LEI 529900DAXFMKONEX8260

Carl Zeiss SMT GmbH

Group parent: Carl Zeiss AG

Awards tracked

13

Value

€40.49M

Countries

DE

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Contract awards & public grants

101194232 - ACT10 - ADVANCED CMOS TECHNOLOGY FOR 10 A NODE → CARL ZEISS SMT GMBH

ECSEL - Chips Joint Undertaking · DE · Grant · 2025-10-01

€1.8M

Advanced CMOS Technology for 10 A node → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2025-05-16

€1.8M

10 Angstrom CMOS exploration → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2024-05-17

€2.09M

14 Angstroms Module Integration → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2023-05-10

€2.28M

14 Anstrom CMOS IC technology → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2022-11-27

€3.77M

Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2021-05-12

€4.09M

IC Technology for the 2nm Node → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2020-05-19

€2.78M

Pilot Integration of 3nm Semiconducter technology → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2019-05-13

€5.91M

Technology Advances for Pilotline of Enhanced Semiconductors for 3nm → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2018-05-17

€4.16M

Technology Advances and Key Enablers for Module Integration for 5 nm → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2017-05-15

€5.6M

Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2016-08-10

€249,216

Technology Advances and Key Enablers for 5 nm → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2016-05-04

€3.6M

Seven Nanometer Technology → CARL ZEISS SMT GMBH

European Commission · DE · Grant · 2015-08-27

€2.36M

Entity identity is matched from published recipient names and registry IDs to GLEIF legal-entity records; matches can be imperfect. Source records are public procurement and grant notices.