LEI 9695005AZU71ZS4K1823

PFEIFFER VACUUM

Group parent: Busch SE

Awards tracked

16

Value

€3.39M

Countries

FR

Contract awards & public grants

101194232 - ACT10 - ADVANCED CMOS TECHNOLOGY FOR 10 A NODE → PFEIFFER VACUUM

ECSEL - Chips Joint Undertaking · FR · Grant · 2025-10-01

€318,762

€190,757

€190,763

€144,125

Advanced CMOS Technology for 10 A node → PFEIFFER VACUUM

European Commission · FR · Grant · 2025-05-16

€318,750

€144,119

14 Angstroms Module Integration → PFEIFFER VACUUM

European Commission · FR · Grant · 2023-05-10

€430,528

IC Technology for the 2nm Node → PFEIFFER VACUUM

European Commission · FR · Grant · 2020-05-19

€184,304

Metrology Advances for Digitized ECS industry 4.0 → PFEIFFER VACUUM

European Commission · FR · Grant · 2019-05-21

€202,955

Pilot Integration of 3nm Semiconducter technology → PFEIFFER VACUUM

European Commission · FR · Grant · 2019-05-13

€196,909

Seven Nanometer Technology → PFEIFFER VACUUM

European Commission · FR · Grant · 2015-08-27

€117,345

Entity identity is matched from published recipient names and registry IDs to GLEIF legal-entity records; matches can be imperfect. Source records are public procurement and grant notices.